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Address:99,Binhe North Road, Luoyang, Henan Province, P.R.China

Zip code:471003

Tel:86-379-63390449  63390036

Fax:86-379-63390365

Website:www.mclwafer.com

Mailbox:mcl@mclwafer.com

You are here:MCL Electronic Materials, Ltd. > Products

 

 

MCL产品规格:
参数
100mm
125mm
150mm
生长方法
直拉
直拉
直拉
掺杂剂
PP+;硼
PP+;硼
PP+;硼
 
NN+;磷,锑,砷
NN+;磷,锑,砷
NN+;磷,锑,砷
晶向
1-0-0
1-0-0
1-0-0
 
1-1-1
1-1-1
1-1-1
 
1-1-0
1-1-0
1-1-0
电阻率
P型:0.001-300
P型:0.001-300
P型:0.001-300
 
N型:磷 0.0007-100
N型:磷 0.0007-100
N型:磷 0.0007-100
 
            0.006-0.02
            0.006-0.02
            0.006-0.02
 
          0.001-0.01
          0.001-0.01
          0.001-0.01
氧含量
6-18ppm(New ASTM)
6-18ppm(New ASTM)
6-18ppm(New ASTM)
碳含量
0.5ppma Max
0.5ppma Max
0.5ppma Max
体金属含量
5*1010/cm3 Max
5*1010/cm3 Max
5*1010/cm3 Max
表面金属含量
5*1010/cm2 Max
5*1010/cm2 Max
5*1010/cm2 Max
位错
总平整度
2.0 Microns Max
2.0 Microns Max
2.0 Microns Max
总厚度变化
3.0 Microns Max
3.0 Microns Max
3.0 Microns Max
局部平整度(15*15 100%)
1.0 Microns Max
1.0 Microns Max
1.0 Microns Max
翘曲度
30 Microns Max
30 Microns Max
30 Microns Max
弯曲度
30 Microns Max
30 Microns Max
30 Microns Max
厚度
目标值+/-15Microns
目标值+/-15Microns
目标值+/-15Microns
正面粒子数
0.3Microns 10Max/Wafer
0.2Microns 18Max/Wafer
0.3Microns 10Max/Wafer
0.2Microns 18Max/Wafer
0.3Microns 10Max/Wafer
0.2Microns 18Max/Wafer
硅片正面
抛光面
抛光面
抛光面
硅片背面
BSD/Poly/SiO2/Etched
BSD/Poly/SiO2/Etched
BSD/Poly/SiO2/Etched
激光刻字
/软激光标记
/软激光标记
/软激光标记

 MCL has strong ability of processing techniques and security, and may, according to the needs of the customers or particular specifications meeting customer needs to provide products and services.